TECHNOLOGY
FC-280 380 SA Series
Low-cost, premium quality elastomer-sealed mass flow controllers and meters.
Designed to meet the exacting requirements of semi conductor processes and equipment, the Tylan FC280SA and FM380SA
models are premium quality elastomer-sealed mass flow controllers and meters.
These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
FC-2900 3900 Series
Mass Flow Controllers and Flowmeters Low-cost, premium quality elastomer-sealed mass flow controllers and meters
esigned to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC2900 and FM3900 models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
FC-2920 3920 Series
Mass Flow Controllers and Flowmeters Provides superior gas flow control and measurement up to 200 slm (420 scfh)
The Tylan FC2920 mass flow controllers and the Tylan FM3920 flowmeters accurately and reliably measure and control the mass flow rate of gases up to
200 slm (420 scfh) of nitrogen equivalents. The Tylan FC2921 offers a 15-pin D connector with optional 4-20 mA DC signals.
The Tylan FM3920 and FM3921 flowmeters have the same specifications and dimensions as the Tylan FC2920 and Tylan FC2921 MFCs respectively. The Tylan FC2920 MFCs consist of a thermal gas flow sensor, adjustable bypass flow splitter, adjustable solenoid control valve and electronics.
FC-2925 3925 Series
Mass Flow Controllers and Flowmeters Provides accurate and reliable measurement and control up to 1000 slm (2100 scfh)
The Tylan FC2925 mass flow controllers accurately and reliably measure and control the mass flow rate of gases up to 1000 slm (2100 scfh) of nitrogen equivalents. The Tylan FM3925 mass flowmeters operate over the same flow range and at pressures up to 500 psig. The Tylan FC2925 MFC and Tylan FM3925 flowmeter are equipped with a card edge connector. The Tylan FC2926 MFC and Tylan FM3926 flowmeter are available with a 15-pin subminiature Dconnector and optional 4 - 20 mA DC input and output signals, 0 - 5 VDC is standard. The Tylan FC2925 mass flow controller consists of a thermal gas flow sensor, bypass flow splitter, pilot-operated control valve and electronics.
